World Library  


Add to Book Shelf
Flag as Inappropriate
Email this Book

Applied Physics Letters : Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators

By Hengky Chandrahalim, Sunil A. Bhave, Ronald Polcawich, Jeff Pulskamp, Daniel Judy et al

Click here to view

Book Id: WPLBN0002169259
Format Type: PDF eBook :
File Size: Serial Publication
Reproduction Date: 10 December 2008

Title: Applied Physics Letters : Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators  
Author: Hengky Chandrahalim, Sunil A. Bhave, Ronald Polcawich, Jeff Pulskamp, Daniel Judy et al
Volume: Issue : December 2008
Language: English
Subject: Science, Physics, Natural Science
Collections: Periodicals: Journal and Magazine Collection (Contemporary), Applied Physics Letters Collection
Historic
Publication Date:
Publisher: American Institute of Physics

Citation

APA MLA Chicago

Sunil A. Bhave, Ronald Polcawich, Jeff Pulskamp, Daniel Judy Et A, H. C. (n.d.). Applied Physics Letters : Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators. Retrieved from http://nationalpubliclibrary.info/


Description
Description: This paper provides a quantitative comparison and explores the design space of lead zirconium titanate (PZT)–only and PZT-on-silicon length-extensional mode resonators for incorporation into radio frequency microelectromechanical system filters and oscillators. We experimentally measured the correlation of motional impedance (RX) and quality factor (Q) with the resonators’ silicon layer thickness (tSi). For identical lateral dimensions and PZT-layer thicknesses (tPZT), the PZT-on-silicon resonator has higher resonant frequency (fC), higher Q (5100 versus 140), lower RX (51 Ω versus 205 Ω), and better linearity [third-order input intercept point (IIP3) of +43.7 dBm versus +23.3 dBm]. In contrast, the PZT-only resonator demonstrated much wider frequency tuning range (5.1% versus 0.2%).

 

Click To View

Additional Books


  • Biblioteca Hispanica : Notions of Natura... (by )
  • Chaos : Community structures and role de... Volume Issue : October 2008 (by )
  • The Journal of Chemical Physics : Equili... Volume Issue : November 2008 (by )
  • Applied Physics Letters : Coupling of ni... Volume Issue : December 2008 (by )
  • Applied Physics Letters : Electronic str... Volume Issue : December 2008 (by )
  • Journal of Applied Physics : The role of... Volume Issue : November 2008 (by )
  • The Journal of Chemical Physics : The Al... Volume Issue : November 2008 (by )
  • Biblioteca Hispanica : a Natural History (by )
  • Review of Scientific Instruments : Devel... Volume Issue : December 2008 (by )
  • Biblioteca Hispanica : Primer Natural Hi... (by )
  • Physics of Fluids : History force on an ... Volume Issue : September 2008 (by )
  • Biblioteca Hispanica : Opening Address a... (by )
Scroll Left
Scroll Right

 



Copyright © World Library Foundation. All rights reserved. eBooks from National Public Library are sponsored by the World Library Foundation,
a 501c(4) Member's Support Non-Profit Organization, and is NOT affiliated with any governmental agency or department.